Product Info

The IKO SA Series Alignment Stage is a compact, low-profile XYθ positioning system built with C-Lube Linear Ways and Cross Roller Bearings. It delivers ultra-precise, backlash-free motion—ideal for cleanroom and high-accuracy applications such as semiconductor manufacturing.

■ Product Features
- High-Precision XYθ Motion: Equipped with linear motors (XY) and direct-drive motors (θ), enabling smooth, high-accuracy positioning.
- High-Resolution Feedback: Linear encoders offer resolution options of 0.1 μm and 0.5 μm to support diverse accuracy demands.
- Full Closed-Loop Control: Eliminates backlash entirely, ensuring consistently accurate operation under dynamic conditions.
- Low-Profile, Space-Saving Design: Combines compact layout with the rigidity of Cross Roller Bearings and the maintenance-free benefits of C-Lube technology.
- Modular Flexibility: Easily configured into XY tables or X + θ units to suit specific system requirements in semiconductor or precision assembly environments.
- Cleanroom Compatible: Designed to meet stringent environmental standards, supporting high-end production lines.

■ Specifications
- Drive Mechanism: Linear motors (X/Y), direct-drive motors (θ)
- Guidance System: C-Lube Linear Way L and Cross Roller Bearings
- Resolution Options: 0.1 μm and 0.5 μm
- Control: Full closed-loop control for backlash-free precision
- Applications: Semiconductor tools, LCD manufacturing, optical devices, cleanroom automation systems

The IKO SA Series offers precision, speed, and integration flexibility—an optimal solution for industries where alignment accuracy and environmental control are critical.

■ IKO Thompson Asia Coverage
- Thailand: Based in Bangkok, covering Chonburi, Ayutthaya, Samut Prakan, and surrounding regions
- Singapore
- Malaysia: Kuala Lumpur, Penang, and surrounding regions
- Indonesia: Jakarta and surrounding regions
- Vietnam: Ho Chi Minh City, Hanoi, and surrounding regions
- India

👉 Contact us or download the product brochure for detailed specifications and configuration support.

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