Product Info

The IKO Alignment Stage SA Series features a low-profile and compact design utilizing C-Lube Linear Way and Cross Roller Bearings. It achieves precise positioning through smooth XYθ motion, making it ideal for applications requiring high accuracy.

■ Features
High-Precision XYθ Motion: Linear motors and direct-drive motors enable smooth, high-precision positioning on XY and θ axes.
High-Resolution Linear Encoder: Options of 0.1 μm and 0.5 μm resolutions are available to meet varying precision requirements.
Full Closed-Loop Control: Eliminates backlash, ensuring stable and accurate positioning.
Low-Profile and Compact Design: Combines the high rigidity of Cross Roller Bearings with maintenance-free C-Lube technology, suitable for cleanroom environments.
Modular Design for Flexibility: Allows for easy assembly of X-axis and θ-axis combinations or XY alignment tables.

■ Specifications
Drive Mechanism: Linear motors (XY axes), direct-drive motors (θ axis)
Guidance System: C-Lube Linear Way L (linear), Cross Roller Bearings (rotational)
Resolution: 0.1 μm and 0.5 μm options
Control: Full closed-loop control
Applications: Semiconductor manufacturing, LCD-related equipment, cleanroom-compatible systems

■ IKO Thompson Asia Coverage
Thailand: Based in Bangkok, covering Chonburi, Ayutthaya, Samut Prakan, and surrounding regions
Singapore
Malaysia: Kuala Lumpur, Penang, and surrounding regions
Indonesia: Jakarta and surrounding regions
Vietnam: Ho Chi Minh City, Hanoi, and surrounding regions
India

The SA Series Alignment Stage is an ideal positioning system for industries requiring precise alignment and clean environmental compatibility, offering high flexibility in system integration.

For more details, download the PDF or contact us directly.