Product Info

The IKO TX Series delivers ultra-high precision with 0.016 μm linear encoder resolution and full closed-loop control. Equipped with the C-Lube Linear Roller Way Super X, it offers unmatched rigidity and maintenance-free operation—ideal for semiconductor and inspection systems.

■ Features
- Ultra-High Accuracy: Full closed-loop control with a 0.016 μm resolution linear encoder rivals air-stage performance.
- C-Lube Maintenance-Free Design: Capillary lubrication delivers consistent oil to rollers for 5 years or 20,000 km without re-lubrication.
- High Rigidity Roller Guide: Four-row cylindrical rollers ensure stable motion and support under heavy loads and long strokes.
- Flexible Motor Options: Compatible with AC servo and stepper motors, supporting various encoder integrations.
- Durable Structure: Built on a rigid cast-iron frame, engineered for low vibration and long-term repeatability.

■ Specifications
- Material: High-rigidity cast iron
- Guide Mechanism: C-Lube Linear Roller Way Super X
- Positioning Accuracy: 0.016 μm (with linear encoder)
- Control System: Full closed-loop
- Lubrication: Capillary system with C-Lube
- Motor Compatibility: AC servo and stepper motor options

■ Applications
- Semiconductor manufacturing and wafer inspection
- Advanced inspection and metrology systems
- Micro-machining and precision assembly automation

This ultra-precision stage enhances throughput and stability in demanding industries with minimal maintenance needs.

■ IKO Thompson Asia Coverage
- Thailand: Based in Bangkok, covering Chonburi, Ayutthaya, Samut Prakan, and surrounding regions
- Singapore
- Malaysia: Kuala Lumpur, Penang, and surrounding regions
- Indonesia: Jakarta and surrounding regions
- Vietnam: Ho Chi Minh City, Hanoi, and surrounding regions
- India

👉 Download brochure or contact us for technical consultation.

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